設備名稱 Equipment Name

全自動石英舟裝卸片機  Automatic Wafer Handling System for DOA Equipment

設備型號 Equipment Model

SYZ-VI-B

設備用途 Equipment Application

集裝片和卸片一體，可從石英舟中把擴散后的硅片卸到片籃中，也可從片籃中將制絨后的硅片裝入石英舟中?？稍?個石英舟插槽中插?兩片，實現單面擴散片工藝，也可在?個石英舟插槽中插入一片，實現雙面擴散片工藝。采用裝片與卸片可連續銜接?式，實現連續生產；也可單獨裝片或單獨卸片。
Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

技術特點  Features

1、采用進口六軸機械手裝卸片，確保硅片取放高可靠性。
With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers.

2、HMI采用（IPC）工業計算機運行上位軟件，通過網絡通訊實現高速數據交互。
With IPC based running master computer software in HMI, high speed data interaction can be realized by network communication.

3、采用精密檢測元器件檢測石英舟動態位置實現糾偏定位。
With precise detection components to dectect the dynamic position of the quartz boat to rectifying the positioning.  

4、卸片前設有冷卻系統，可防止因高溫帶來對硅片和設備的不良影響。
With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.

5、頂齒、吸盤重要零部件采用特殊加工工藝，極大降低頂齒印、吸盤印。
The comb,gripper adopt special processing technology which greatly reduce the marks on wafers. 

6、裝卸花籃可做立式或臥式，客戶可根據需求靈活選擇。
Cassette can be vertical or horizontal, customer can choose flexibly according to their needs. 

7、可選配MES功能；可選配方阻檢測模組；可選配AGV。

MES function, sheet resistance detection and AGV, optional.

設備參數  Parameters