Equipment Name
Mono-crystalline Batch Texturing Equipment
Equipment Model
SC-CSZ8000E-16F
Equipment Application
Used for texturing& cleaning of mono crystalline wafers.
Process Flow
Saw damage removal→Pre-cleaning→Mono-texturing→Post cleaning→Acid cleaning→Hot water drying→Drying (for reference only)
Features
· Throughput: 400pcs/batch, 8000pcs/h.
· Process bath circulation volume adjustable.
· Uniform pyramids texture, etch depth adjustable.
· Wafer thickness handling capability up to 120μm
· With clean dry area and self-clean dry system.
· H2O2 free.
· Quick inline bath change.
· Available with MES, RFID system, inline weight testing optional.
Parameters